Non-silicon MEMS Technology and its Applications

    Focusing on 3D non-silicon micro & nano compatible fabrication technologies, micro device and micro system integration technologies, multi-disciplinary system research works have being done to study key scientific and technical issues of non- silicon MEMS (micro electromechanical system based on metals, polymers , magnetic materials , etc.) including modeling, simulation , design processing , packaging , testing and application. With the effort on non-silicon micro & nano integrated manufacturing standardization process and complete process, non-silicon MEMS processing platform has been established and developed. In order to enhance Chinese MEMS independent development and application capabilities, special efforts on small volume manufacturing technology and application tests of typical non-silicon MEMS devices and systems, are also being made. A series of achievements about non-silicon MEMS technologies, have been obtained. Nearly two hundred invention patents have been authorized. More than 100 papers have been published in the international or home journals. And many MEMS monographs have also been published. A large number of specialized elites have been cultivated. SJTUí»s no-silicon MEMS fruits have been applied in chemical sensors, biology and biochemistry chips, biology medical analysis, nano technology and devices, micro fluid control chips, MEMS optical devices, IC testing and national defense arms etc., by tens of customers such as Fudan University, Institute of Mechanics of CAS, Dongzhen Electroncs (Guangzhou) LTD corporation, and so on. Non-silicon MEMS technology has won a National Award and 5 prizes at provincial level. Non-silicon MEMS technology of SJTU has reached the level of being advanced in the world and being leading in China.

 

Thin film materials and device

    Fundamental research is to resolve key scientific problems from synthesis mechanism of nanofilms, microscale forming methods, nanostructural surface formation, nanofilm effect, 2D texture formation, flim manipulation of nanomaterials, nanowelding mechanism, selfassemble nanofims, nanofigure etching mechanism, etc. Innovation researchs are mainly toward advanced informative film materials, electronic film nanomaterials, new energy film materials, porous structural new founctional film materials, and the related devices and systems, including electronic nanodevices, 3D integrated circuits, optoelectronic devices, plat panel display, information record and storage, nanosensors, thin film solar cells, super electric battery, nanoscale filtration, quantum devices, etc. High and new production technologies related with thin film materials and devices are potently developed to apply in the important industry fields such as optics, electronics, magnetics, chemistry, mechanics, and healthcares.

 

Electronic Nanomaterials and Nano-device

    To study controllable synthesis of nanomaterials, nanoscale sensorsí» designing and fabrication and their application in biomedicine and energy fields have being developed. Fundamental research will focus on nano-interface and materials engineering as well as interaction between nanomaterials and biomolecules, to study the isolation, purification, immune-detection and imaging diagnosis as well as gene delivery based on nanoscale magnetic thin films, and to hope to achieve domain advantages and features in the following aspects such as nanomaterials controllable synthesis, biological effects, novel principle methods and biosensors for diagnosis of diseases, multifunctional molecular imaging nanoprobes and nanoscale drug delivery system.

 


Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai

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Hu Jiao ICP 20111131